Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer

• TAKAYA Y

収録刊行物

• Measurement

  Measurement 25 9-18, 1999

詳細情報

• CRID: 1570854176724775040
• NII論文ID: 80010912274
• データソース種別:
  • CiNii Articles