Quantitative modeling of reactive sputtering process for MgO thin film deposition

• MATSUDA Y.

収録刊行物

• Thin Solid Films

  Thin Solid Films 390 59-63, 2001

詳細情報

• CRID: 1572543024923933824
• NII論文ID: 80012403726
• データソース種別:
  • CiNii Articles