Solid particle production in fluorocarbon plasmas II : Gas phase reactions for polymerization

• TAKAHASHI K.

収録刊行物

• J. Vac. Sci. Technol. A

  J. Vac. Sci. Technol. A 20 (2), 305-312, 2002

詳細情報

• CRID: 1570009751826302720
• NII論文ID: 80015157402
• データソース種別:
  • CiNii Articles