Fabrication of micro tactile sensor for the measurement of micro-scale local elasticity

• Yoshinobu Murayama

• Sadao Omata

収録刊行物

• Sensors and Actuators A: Physical

  Sensors and Actuators A: Physical 109 (3), 202-207, 2004-01

  Elsevier BV

キーワード

• Electrical and Electronic Engineering
• Metals and Alloys
• Surfaces, Coatings and Films
• Condensed Matter Physics
• Instrumentation
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1360855569548364800
• NII論文ID: 80016400293
• DOI: 10.1016/j.sna.2003.10.003
• ISSN: 09244247
• Web Site: https://api.elsevier.com/content/article/PII:S0924424703005259?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0924424703005259?httpAccept=text/plain
• データソース種別:
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