Effect of nonthermal plasma reactor for CF_4 decomposition

Author(s)

Journal

  • IEEE Trans. Plasma Sci.

    IEEE Trans. Plasma Sci. 31(6), 1349-1354, 2003

Cited by:  5

Codes

  • NII Article ID (NAID)
    80016499407
  • Article Type
    Journal Article
  • Data Source
    CJPref 
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