ALD ... : AVS ... International Conference on ALD

Author(s)

Bibliographic Information

ALD ... : AVS ... International Conference on ALD

American Vacuum Society

Computer File

Other Title

International Conference on Atomic Layer Deposition [proceedings]

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Note

Description based on: 5th (2005)

Details

  • NCID
    AA12182851
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    New York
  • Publication Status
    Currently Published Status
  • Frequency
    Annual
  • Regularity
    Regular
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