書誌事項

Micromachining and micropackaging of transducers

Clifford D. Fung ... [et al.]

(Studies in electrical and electronic engineering, 20)

Elsevier, 1985

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注記

Papers from the Workshop on Micromachining and Micropackaging of Transducers, organized by the faculty associated with the Semiconductor Chemical Transducer Resource at Case Western Reserve University, on Nov. 7-9, 1984

Includes bibliographies

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