Epitaxial silicon technology

Author(s)

• Baliga, B. Jayant

Bibliographic Information

Epitaxial silicon technology

edited by B. Jayant Baliga

Academic Press, 1986

Note

Includes bibliographies and index

Contents of Works

• Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose
• Silicon molecular beam epitaxy / Subramanian S. Iyer
• Silicon liquid phase epitaxy / B. Jayant Baliga
• Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev
• Silicon-on-insulator epitaxy / Hon Wai Lam

Details

• NCID: BA00266340
• ISBN:
  • 0120771209
• LCCN: 86003524
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Orlando
• Pages/Volumes: viii, 328 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Design and construction
  • LCSH : Silicon crystals -- Growth
  • LCSH : Epitaxy