Ion implantation

Author(s)

• Ryssel, Heiner
• Ruge, Ingolf

Bibliographic Information

Ion implantation

Heiner Ryssel and Ingolf Ruge

Wiley, c1986

Other Title

Ionenimplantation

Note

Translation of: Ionenimplantation

Includes index

Details

• NCID: BA00364146
• ISBN:
  • 047110311X
• LCCN: 84003723
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Chichester [West Sussex] ; New York
• Pages/Volumes: xvii, 459 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : Ion implantation
  • LCSH : Semiconductors