Solid state devices 1986 : twelve invited papers presented at the Sixteenth European Solid State Device Research Conference (ESSDERC) held at the University of Cambridge, 8-11 September 1986

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Solid state devices 1986 : twelve invited papers presented at the Sixteenth European Solid State Device Research Conference (ESSDERC) held at the University of Cambridge, 8-11 September 1986

edited by D.F. Moore

(Institute of Physics conference series, no. 82)

Institute of Physics, c1987

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内容説明・目次

目次

New frontiers in power devices (B J Baliga). The device application of silicon molecular beam epitaxy (J C Bean). Pure and applied research aspects of dry etching for silicon technology (V G I Deshmukh). III-V semiconductors on Si substrates (R Fischer and H Morkoc). The microstructure of the Si/Si02 - interface: observation and related electronic properties (M Henzler). X-ray lithography (A Heuberger). Silicon germanium MODFETs (E Kasper and H Daembkes). Device aspects of megabit RAMs (F M Klaassen). Metalorganic molecular beam epitaxy (MOMBE) (H Leth). 2D device modelling (P J Mole). Monolithic microwave integrated circuits (F A Myers). Surface passivation of GaAs (A Shibatomi). Author index.

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