Plasma processing for VLSI

Author(s)

• Einspruch, Norman G.
• Brown, Dale M.

Bibliographic Information

Plasma processing for VLSI

edited by Norman G. Einspruch, Dale M. Brown

（VLSI electronics : microstructure science / edited by Norman G. Einspruch, 8）

Academic Press, 1984

Note

Includes bibliographies and index

Details

• NCID: BA00536241
• ISBN:
  • 0122341082
• LCCN: 83022351
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York ; Orlando
• Pages/Volumes: xiv, 527 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874
  • DC19 : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration
  • LCSH : Plasma (Ionized gases) -- Industrial applications
• Parent Bibliography ID:
  • BA00191015