Microelectronics processing : inorganic materials characterization

著者

• Casper, Lawrence A.
• American Chemical Society. Division of Industrial and Engineering Chemistry

書誌事項

Microelectronics processing : inorganic materials characterization

Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemimcal Society

（ACS symposium series, 295）

American Chemical Society, 1986

注記

Includes bibliographies and indexes

詳細情報

• NII書誌ID(NCID): BA00560858
• ISBN:
  • 0841209340
• LCCN: 85030648
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Washington, DC
• ページ数/冊数: x, 443 p
• 分類:
  • LCC : TK7874
  • DC19 : 621.381/7
• 件名:
  • LCSH : Microelectronics -- Materials -- Congresses
• 親書誌ID:
  • BA00073096