Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

Author(s)

• Coburn, J. W.
• Gottscho, R. A.
• Hess, Dennis W.
• Materials Research Society
• Symposium on Plasma Processing

Bibliographic Information

Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

editors, J.W. Coburn, R.A. Gottscho, D.W. Hess

（Materials Research Society symposium proceedings, v. 68）

Materials Research Society, c1986

Note

Includes indexes

Details

• NCID: BA00570669
• ISBN:
  • 0931837340
• LCCN: 86016292
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pittsburgh, Pa.
• Pages/Volumes: xvii, 463 p.
• Size: 24 cm
• Classification:
  • LCC : TA2005
  • DC19 : 621.044
• Subject Headings:
  • LCSH : Plasma engineering -- Congresses
• Parent Bibliography ID:
  • BA00013775