Physical sputtering of single-element solids

書誌事項

Physical sputtering of single-element solids

edited by R. Behrisch, with contributions by H.H. Andersen ... [et al.]

(Topics in applied physics, v. 47 . Sputtering by particle bombardment / edited by R. Behrisch ; 1)

Springer-Verlag, 1981

  • : Ger
  • : U.S

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Includes bibliographical references and indexes

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