Ion beam modification of insulators

書誌事項

Ion beam modification of insulators

edited by Paolo Mazzoldi, George W. Arnold

(Beam modification of materials, 2)

Elsevier, 1987

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

This volume provides a current treatise on the chemical and physical property modifications induced by ion beams in insulators, including applications in astrophysics, geophysics, material technology, optoelectronics, memory devices and polymers. An extensive review is given of experimental methods for the analysis of ion bombarded insulators, including optical and structural methods, resonance, energetic ion methods and surface techniques. An appendix of more than 90 pages presents the most extensive ion-range tables for insulators so far. These tables cover a wide regime of energies and a wide variety of insulating targets, including glasses and many organic and ceramics materials. The book will be of particular value to research physicists, chemists, astrophysicists and geophysicists as well as engineers interested in optoelectronics, polymers, nuclear energy and material technology.

目次

1. Ion Ranges and Energy Deposition in Insulators (J.P. Biersack). 2. The Sputtering of Insulators (R. Kelly). 3. Characterization Techniques for Ion Bombarded Insulators (J.A. Borders). 4. Defect Creation in Ion Bombarded Inorganic Insulators (A. Perez, P. Thevenard). 5. Ion Beam Modification of Glasses (G.W. Arnold, P. Mazzoldi). 6. The Mechanical and Tribological Properties of Ion Implanted Ceramics (C.J. McHargue). 7. Synthesis of Dielectric Layers in Silicon by Ion Implantation (I.H. Wilson). 8. Ion Beam Effects in Organic Molecular Solids and Polymers (T. Venkatesan, L. Calcagno, B.S. Elman, G. Foti). 9. Condensed Gases (W.L. Brown). 10. Optoelectronic Materials (G. Gotz). 11. Ferromagnetic Garnets (P. Gerard). 12. Nuclear Waste Materials (Hj. Matzke). 13. Role of Defects on the Aqueous Dissolution of Ion-Bombarded Insulators (G. Della Mea, J.-C. Dran, J.-C. Petit). 14. Chemical Effects of Ion Bombardment (G.K. Wolf, K. Roessler). 15. Ion Beam Effects on Thin Film Adhesion (J.E.E. Baglin). 16. Astrophysical Implications of Ions Incident on Insulators (L.J. Lanzerotti, R.E. Johnson). Subject Index. Appendix: Tables of Ion Ranges in Insulators.

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