Materials and process characterization

Author(s)

• Einspruch, Norman G.
• Larrabee, Graydon B.

Bibliographic Information

Materials and process characterization

edited by Norman G. Einspruch, Graydon B. Larrabee

（VLSI electronics : microstructure science / edited by Norman G. Einspruch, 6）

Academic Press, 1983

Note

Includes bibliographical references and index

Details

• NCID: BA01084713
• ISBN:
  • 0122341066
• LCCN: 81002877
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York ; Orlando ; Tokyo
• Pages/Volumes: xii, 601 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874
  • DC19 : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration
  • LCSH : Plasma (Ionized gases) -- Industrial applications
• Parent Bibliography ID:
  • BA00191015