Integrated circuits : chemical and physical processing : developed from the winter symposium

書誌事項

Integrated circuits : chemical and physical processing : developed from the winter symposium

sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society, University of California--Davis, March 26-27, 1984 ; Pieter Stroeve, editor

(ACS symposium series, 290)

American Chemical Society, 1985

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Includes bibliographies and indexes

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