書誌事項

Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.

editors, R.E. Howard ... [et al.]

(Materials Research Society symposium proceedings, v. 76)

Materials Research Society, c1987

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注記

Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting

Includes bibliographies

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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