Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.

Author(s)

• Howard, R. E. (Richard Edwin)
• Symposium on the Science and Technology of Microfabrication
• Materials Research Society. Meeting
• Materials Research Society

Bibliographic Information

Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.

editors, R.E. Howard ... [et al.]

（Materials Research Society symposium proceedings, v. 76）

Materials Research Society, c1987

Note

Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting

Includes bibliographies

Details

• NCID: BA01149091
• ISBN:
  • 0931837421
• LCCN: 87007749
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pittsburgh, Pa.
• Pages/Volumes: xvii, 373 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874
  • DC19 : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA00013775