Optical metrology : coherent and incoherent optics for metrology, sensing and control in science, industry, and biomedicine
著者
書誌事項
Optical metrology : coherent and incoherent optics for metrology, sensing and control in science, industry, and biomedicine
（NATO ASI series, ser. E . Applied sciences ; no. 131）
M. Nijhoff, 1987
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注記
"Proceedings of the NATO Advanced Study Institute on Optical Metrology, Viana do Castelo, Portugal, July 16-27, 1984"--T.p. verso
"Published in cooperation with NATO Scientific Affairs Division."
Includes bibliographies and index
