Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.

著者

• Donnelly, Vincent M.
• Herman, Irving P.
• 広瀬, 全孝 ヒロセ, マサタカ
• Materials Research Society
• Materials Research Society. Meeting
• Symposium on Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces

書誌事項

Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.

editors, Vincent M. Donnelly, Irving P. Herman, Masataka Hirose

（Materials Research Society symposium proceedings, v. 75）

Materials Research Society, c1987

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA0143036X
• ISBN:
  • 0931837413
• LCCN: 87018554
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xix, 826 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TA418.6
  • DC19 : 620.1/1228
• 件名:
  • LCSH : Materials -- Effect of radiation on -- Congresses
  • LCSH : Surface chemistry -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Photon beams -- Industrial applications -- Congresses
  • LCSH : Plasma etching -- Congresses
• 親書誌ID:
  • BA00013775