Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.

著者

• Donnelly, Vincent M.
• Herman, Irving P.
• 広瀬, 全孝 ヒロセ, マサタカ
• Materials Research Society
• Materials Research Society. Meeting
• Symposium on Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces

書誌事項

Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.

editors, Vincent M. Donnelly, Irving P. Herman, Masataka Hirose

（Materials Research Society symposium proceedings, v. 75）

Materials Research Society, c1987

詳細情報

• NII書誌ID(NCID): BA0143036X
• ISBN:
  • 0931837413
• LCCN: 87018554
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xix, 826 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TA418.6
  • DC19 : 620.1/1228
• 件名:
  • LCSH : Materials -- Effect of radiation on -- Congresses
  • LCSH : Surface chemistry -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Photon beams -- Industrial applications -- Congresses
  • LCSH : Plasma etching -- Congresses
• 親書誌ID:
  • BA00013775