Laser processing of thin films and microstructures : oxidation, deposition and etching of insulators
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Bibliographic Information
Laser processing of thin films and microstructures : oxidation, deposition and etching of insulators
（Springer series in materials science, v. 3）
Springer-Verlag, c1987
- : U.S.
- : Germany
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Note
Bibliography: p. 287-313
Includes index
