Methods and materials in microelectronic technology

著者

• International Symposium on Methods and Materials in Microelectronic Technology
• Bargon, Joachim

書誌事項

Methods and materials in microelectronic technology

edited by Joachim Bargon

（The IBM research symposia series）

Plenum Press, c1984

タイトル別名

Microelectronic technology

注記

"Proceedings of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29-October 1, 1982, in Bad Neuenahr, Federal Republic of Germany"--T.p. verso

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA01477104
• ISBN:
  • 0306418037
• LCCN: 84013352
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: New York
• ページ数/冊数: viii, 367 p.
• 大きさ: 26 cm
• 分類:
  • LCC : TK7874
  • DC19 : 621.381/7
• 件名:
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction -- Congresses
  • LCSH : Photolithography -- Congresses
  • LCSH : Ion beam lithography -- Congresses
  • LCSH : X-ray lithography -- Congresses
• 親書誌ID:
  • BA01477192