Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.

著者

• Wilson, Syd R.
• Powell, Ronald A.
• Davies, D. Eirug
• Materials Research Society
• Materials Research Society. Meeting
• Symposium on "Rapid Thermal Processing of Electronic Materials"

書誌事項

Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.

editors, Syd R. Wilson, Ronald Powell, D. Eirug Davies

（Materials Research Society symposium proceedings, v. 92）

Materials Research Society, c1987

注記

Includes bibliographies and indexes

詳細情報

• NII書誌ID(NCID): BA0147740X
• ISBN:
  • 0931837596
• LCCN: 87022025
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xvii, 485 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Heat treatment -- Congresses
  • LCSH : Semiconductor doping -- Congresses
• 親書誌ID:
  • BA00013775