Microscopy of semiconducting materials, 1983 : proceedings of the Institute of Physics Conference held in St Catherine's College, Oxford, 21-23 March 1983
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書誌事項
Microscopy of semiconducting materials, 1983 : proceedings of the Institute of Physics Conference held in St Catherine's College, Oxford, 21-23 March 1983
（Institute of Physics conference series, no. 67）
Institute of Physics, c1983
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注記
Includes bibliographies and indexes
内容説明・目次
内容説明
This volume contains invited and contributed papers at the conference on Microscopy of Semiconducting Materials which took place on 21-23 March 1983 in St Cathernine's College, Oxford. The conference was the third in the series devoted to advances in microscopical studies of semiconductors.
目次
Section 1 Structure and properties of dislocations, Section 2 High resolution microscopy, Section 3 Transient annealing phenomena, Section 4 Silicon characterisation, Section 5 Compund semiconductor characterization, Section 6 Scanning EBIC and CL, Section 7 X-ray techniques, Section 8 Non-conventional microscopy, Section 9 Device assement by scanning microscopy, Section 10 Device assessment by transmisison microscopy.
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