Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

著者

• Fair, Richard B.
• Pearce, Charles W.
• Washburn, Jack
• Symposium on Impurity Diffusion and Gettering in Semiconductors
• Materials Research Society. Meeting
• Materials Research Society

書誌事項

Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

editors, Richard B. Fair, Charles W. Pearce, Jack Washburn

（Materials Research Society symposium proceedings, v. 36）

Materials Research Society, c1985

注記

"Proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors ... held as Symposium C at the Material's Research Society Meeting, November 27-30, 1984 in Boston"--Acknowledgments

Includes bibliographies and indexes

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

「Nielsen BookData」 より

• NII書誌ID(NCID): BA03262776
• ISBN:
  • 0931837014
• LCCN: 85007226
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xiii, 284 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
  • NDC8 : 549.8
• 件名:
  • LCSH : Semiconductors -- Defects -- Congresses
  • LCSH : Diffusion -- Congresses
  • LCSH : Semiconductor doping -- Congresses
  • LCSH : Getters -- Congresses
• 親書誌ID:
  • BA00013775