Bibliographic Information

Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

editors, Richard B. Fair, Charles W. Pearce, Jack Washburn

(Materials Research Society symposium proceedings, v. 36)

Materials Research Society, c1985

Available at  / 13 libraries

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Note

"Proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors ... held as Symposium C at the Material's Research Society Meeting, November 27-30, 1984 in Boston"--Acknowledgments

Includes bibliographies and indexes

Description and Table of Contents

Description

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

by "Nielsen BookData"

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