Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
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Bibliographic Information
Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
(Materials Research Society symposium proceedings, v. 36)
Materials Research Society, c1985
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"Proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors ... held as Symposium C at the Material's Research Society Meeting, November 27-30, 1984 in Boston"--Acknowledgments
Includes bibliographies and indexes
Description and Table of Contents
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
by "Nielsen BookData"