Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
著者
書誌事項
Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
（Materials Research Society symposium proceedings, v. 38）
Materials Research Society, c1985
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注記
Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984
Includes bibliographies and indexes
内容説明・目次
内容説明
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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