Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

著者

• Wittmer, Marc
• Stimmell, James
• Strathman, Michael
• Materials Research Society
• Symposium on "Materials Issues in Silicon Integrated Circuit Processing"

書誌事項

Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

editors, Marc Wittmer, James Stimmell, Michael Strathman

（Materials Research Society symposium proceedings, v. 71）

Materials Research Society, c1986

注記

Includes bibliographies and indexes

• NII書誌ID(NCID): BA03515168
• ISBN:
  • 0931837375
• LCCN: 86018108
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xvii, 535 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7874
  • DC19 : 621.381/7
• 件名:
  • LCSH : Microelectronics -- Materials -- Congresses
• 親書誌ID:
  • BA00013775