Semiconductor lithography : principles, practices, and materials

Author(s)

• Moreau, Wayne M.

Bibliographic Information

Semiconductor lithography : principles, practices, and materials

Wayne M. Moreau

（Microdevices : physics and fabrication technologies）

Plenum Press, c1988

Note

Includes bibliographical references and index

• NCID: BA03566023
• ISBN:
  • 0306421852
• LCCN: 87029077
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xx, 931 p.
• Size: 26 cm
• Classification:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors
  • LCSH : Microlithography
  • LCSH : Photoresists
• Parent Bibliography ID:
  • BA01301028