Electron and ion optics

Author(s)

• Szilágyi, Miklós

Bibliographic Information

Electron and ion optics

Miklos Szilagyi

（Microdevices : physics and fabrication technologies）

Plenum Press, c1988

Note

Includes index

Bibliography: p. 515-528

• NCID: BA03946294
• ISBN:
  • 0306427176
• LCCN: 87032180
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xvi, 539 p.
• Size: 26 cm
• Classification:
  • LCC : QC793.5.E62
  • DC19 : 537.5/6
• Subject Headings:
  • LCSH : Electron optics
  • LCSH : Electron beams
  • LCSH : Ion bombardment
  • LCSH : Electromagnetic lenses
• Parent Bibliography ID:
  • BA01301028