Silicon processing : a symposium

著者

    • Gupta, D. C. (Dinesh C.)
    • ASTM Committee F-1 on Electronics
    • United States. National Bureau of Standards
    • Stanford University
    • Symposium on Silicon Processing

書誌事項

Silicon processing : a symposium

sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor

（ASTM special technical publication, 804）

ASTM, c1983

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注記

Papers presented at the Symposium on Silicon Processing, held in San Jose, Calif., Jan 19-22, 1982

"ASTM publication code number (PCN) 04-804000-46."

Includes bibliographical references and index

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