Tables of ion implantation spatial distributions

Author(s)

• Burenkov, A. F. (Aleksandr Fedorovich)
• Amoretty, S. J.

Bibliographic Information

Tables of ion implantation spatial distributions

A.F. Burenkov ... [et al.]

Gordon & Breach Science Publishers, c1986

English ed., rev. and enl. / translated from the Russian by S.J. Amoretty

• : Switzerland

Other Title

Tablit︠s︡y parametrov prostranstvennogo raspredelenii︠a︡ ionno-implantirovannykh primeseĭ

Note

Translation of: Tablit︠s︡y parametrov prostranstvennogo raspredelenii︠a︡ ionno-implantirovannykh primeseĭ

"Published under license by OPA Ltd. for Gordon and Breach Science Publishers S.A."

Bibliography: p. 52-55

Includes index

Details

• NCID: BA04330441
• ISBN:
  • 2881240712
• LCCN: 85017565
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Original Language Code: rus
• Place of Publication: New York
• Pages/Volumes: viii, 462 p.
• Size: 23 cm
• Classification:
  • LCC : QC702.7.I55
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : Ion implantation -- Tables