Emerging semiconductor technology : a symposium

著者

• Gupta, D. C. (Dinesh C.)
• Langer, Paul H.
• ASTM Committee F-1 on Electronics
• International Symposium on Semiconductor Processing

書誌事項

Emerging semiconductor technology : a symposium

sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors

（ASTM special technical publication, 960）

American Society for Testing and Materials, c1987

注記

Papers presented at the Fourth International Symposium on Semiconductor Processing

"ASTM publication code number (PCN) 04-960000-46."

Includes bibliographies and indexes

詳細情報

• NII書誌ID(NCID): BA04332527
• ISBN:
  • 0803104596
• LCCN: 86028761
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Philadelphia, PA
• ページ数/冊数: 704 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• 件名:
  • LCSH : Semiconductor industry -- Congresses
  • LCSH : Semiconductors -- Design and construction -- Congresses
• 親書誌ID:
  • BA00068096