Emerging semiconductor technology : a symposium

Author(s)

• Gupta, D. C. (Dinesh C.)
• Langer, Paul H.
• ASTM Committee F-1 on Electronics
• International Symposium on Semiconductor Processing

Bibliographic Information

Emerging semiconductor technology : a symposium

sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors

（ASTM special technical publication, 960）

American Society for Testing and Materials, c1987

Note

Papers presented at the Fourth International Symposium on Semiconductor Processing

"ASTM publication code number (PCN) 04-960000-46."

Includes bibliographies and indexes

• NCID: BA04332527
• ISBN:
  • 0803104596
• LCCN: 86028761
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Philadelphia, PA
• Pages/Volumes: 704 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductor industry -- Congresses
  • LCSH : Semiconductors -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA00068096