Ion implantation : science and technology

Author(s)

• Ziegler, J. F.

Bibliographic Information

Ion implantation : science and technology

edited by J.F. Ziegler

Academic Press, c1988

2nd ed

Note

Includes bibliographies and index

Details

• NCID: BA04333450
• ISBN:
  • 0127806210
• LCCN: 88006382
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boston
• Pages/Volumes: ix, 498 p.
• Size: 24 cm
• Classification:
  • LCC : QC702.7.I55
  • DC19 : 539/.6
• Subject Headings:
  • LCSH : Ion implantation