Introduction to microlithography : theory, materials, and processing

著者

書誌事項

Introduction to microlithography : theory, materials, and processing

L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983

（ACS symposium series, 219）

The American Chemical Society, 1983

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注記

Includes bibliographical references and index

収録内容

  • An introduction to lithography / L.F. Thompson
  • The lithographic process
  • The physics / L.F. Thompson and M.J. Bowden
  • Organic resist materials
  • Theory and chemistry / C. Grant Willson
  • Resist processing / L.F. Thompson and M.J. Bowden
  • Plasma etching / J.A. Mucha and D.W. Hess
  • Multi-layer resist systems / B.J. Lin

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