Polycrystalline silicon for integrated circuit applications

Author(s)

• Kamins, Theodore I.

Bibliographic Information

Polycrystalline silicon for integrated circuit applications

by Ted Kamins

（The Kluwer international series in engineering and computer science, SECS 45）

Kluwer Academic Publishers, c1988

Note

Bibliography: p. 249-280

Includes index

Details

• NCID: BA04964371
• ISBN:
  • 0898382599
• LCCN: 87033436
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boston
• Pages/Volumes: xii, 290 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.15.S55
  • DC19 : 621.381/71
• Subject Headings:
  • LCSH : Integrated circuits -- Materials
  • LCSH : Silicon -- Electric properties
• Parent Bibliography ID:
  • BA0004729X