Polycrystalline silicon for integrated circuit applications

著者

• Kamins, Theodore I.

書誌事項

Polycrystalline silicon for integrated circuit applications

by Ted Kamins

（The Kluwer international series in engineering and computer science, SECS 45）

Kluwer Academic Publishers, c1988

注記

Bibliography: p. 249-280

Includes index

• NII書誌ID(NCID): BA04964371
• ISBN:
  • 0898382599
• LCCN: 87033436
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Boston
• ページ数/冊数: xii, 290 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.15.S55
  • DC19 : 621.381/71
• 件名:
  • LCSH : Integrated circuits -- Materials
  • LCSH : Silicon -- Electric properties
• 親書誌ID:
  • BA0004729X