Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI)

著者

• McGuire, G. E.

書誌事項

Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI)

edited by Gary E. McGuire

（Materials science and process technology series）

Noyes Publications, c1988

注記

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA0500408X
• ISBN:
  • 0815511507
• LCCN: 87031529
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Park Ridge, N.J., U.S.A.
• ページ数/冊数: xiii, 675 p.
• 大きさ: 25 cm
• 分類:
  • LCC : TK7874
  • DC19 : 621.395
• 件名:
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction -- Handbooks, manuals, etc
• 親書誌ID:
  • BA04523161