Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA

Author(s)

• Ehrlich, Daniel J.
• Higashi, Gregg S.
• Oprysko, Modest Michael
• Materials Research Society

Bibliographic Information

Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA

editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko

（Materials Research Society symposium proceedings, v. 101）

Materials Research Society, c1988

Note

Includes bibliographies and indexes

Details

• NCID: BA05021227
• ISBN:
  • 0931837693
• LCCN: 88005363
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pittsburgh, Pa.
• Pages/Volumes: xv, 509 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874
  • DC19 : 621.381/7
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Lasers in chemistry -- Congresses
• Parent Bibliography ID:
  • BA00013775