Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA

著者

• Ehrlich, Daniel J.
• Higashi, Gregg S.
• Oprysko, Modest Michael
• Materials Research Society

書誌事項

Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA

editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko

（Materials Research Society symposium proceedings, v. 101）

Materials Research Society, c1988

注記

Includes bibliographies and indexes

詳細情報

• NII書誌ID(NCID): BA05021227
• ISBN:
  • 0931837693
• LCCN: 88005363
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xv, 509 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7874
  • DC19 : 621.381/7
• 件名:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Lasers in chemistry -- Congresses
• 親書誌ID:
  • BA00013775