Laser chemical processing for microelectronics

Author(s)

• Ibbs, K. G.
• Osgood, R. M.

Bibliographic Information

Laser chemical processing for microelectronics

edited by K.G. Ibbs, R.M. Osgood

（Cambridge studies in modern optics, 7）

Cambridge University Press, 1989

Note

Includes bibliographies and index

Details

• NCID: BA05061582
• ISBN:
  • 0521322545
• LCCN: 87035864
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Cambridge [Cambridgeshire] ; New York
• Pages/Volumes: 172 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874
  • DC19 : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction
  • LCSH : Lasers -- Industrial applications
• Parent Bibliography ID:
  • BA00228454