Laser chemical processing for microelectronics
著者
書誌事項
Laser chemical processing for microelectronics
（Cambridge studies in modern optics, 7）
Cambridge University Press, 1989
大学図書館所蔵 全8件
注記
Includes bibliographies and index
内容説明・目次
内容説明
This book describes the application of laser processing techniques in the fabrication of semiconductor materials and devices for the microelectronics industry. It comprises a collection of reviews of interest to those involved with a semiconductor fabrication facility.
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