Advanced MOS device physics

Author(s)

• Einspruch, Norman G.
• Gildenblat, Gennady Sh.

Bibliographic Information

Advanced MOS device physics

edited by Norman G. Einspruch, Gennady Sh. Gildenblat

（VLSI electronics : microstructure science / edited by Norman G. Einspruch, v. 18）

Academic Press, c1989

Note

Includes bibliographies and index

Details

• NCID: BA05099858
• ISBN:
  • 012234118X
• LCCN: 81002877
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: San Diego, Calif. ; Tokyo
• Pages/Volumes: xi, 370 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874. V56
  • DC19 : 621.395
  • NDC8 : 549.708
  • NDC7 : 549.3
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration
  • LCSH : Lithography
• Parent Bibliography ID:
  • BA00191015