Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA

Author(s)

• Pfefferkorn Conference
• Kyser, David F.

Bibliographic Information

Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA

edited by David F. Kyser ... [et al.] ; managing editor, Daniel Halibey

Scanning Electron Microscopy, Inc., c1984

Note

Includes bibliographies and indexes

Details

• NCID: BA06299513
• ISBN:
  • 0931288304
• LCCN: 88140898
• Country Code: us
• Title Language Code: eng
• Place of Publication: AMF O'Hare [Chicago], IL
• Pages/Volumes: xii, 372 p.
• Size: 29 cm
• Classification:
  • LCC : QC176.8.R3
  • DC19 : 530.4/1
• Subject Headings:
  • LCSH : Solids -- Effect of radiation on -- Congresses
  • LCSH : Electron beams -- Congresses
  • LCSH : Electrons -- Scattering -- Congresses
  • LCSH : Backscattering -- Congresses
  • LCSH : Microlithography -- Congresses
  • LCSH : Electron energy loss spectroscopy -- Congresses