Fine line lithography

Author(s)

• Newman, Roger

Bibliographic Information

Fine line lithography

edited by Roger Newman

（Materials processing, theory and practices, v. 1）

North-Holland Pub. Co., 1980 , sole distributor for the USA and Canada, Elsevier North-Holland, 1980

Note

Includes bibliographies and index

Details

• NCID: BA06400388
• ISBN:
  • 0444853510
• LCCN: 80013154
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Amsterdam ; New York,New York
• Pages/Volumes: vii, 481 p.
• Size: 23 cm
• Classification:
  • LCC : TK7874
  • DC : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Large scale integration
  • LCSH : Lithography
• Parent Bibliography ID:
  • BA00157684