Microelectronic materials and processes

Author(s)

• Levy, Roland A. (Roland Albert)

Bibliographic Information

Microelectronic materials and processes

edited by R.A. Levy

（NATO ASI series, ser. E . Applied sciences ; no. 164）

Kluwer Academic, 1989

• : hbk
• : pbk

Note

Includes index

Proceedings of the NATO Advanced Study Institute on Microelectronic Materials and Processes II Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986

Details

• NCID: BA06663580
• ISBN:
  • 0792301471
  • 0792301544
• LCCN: 89002751
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Dordrecht ; Boston
• Pages/Volumes: 985 p.
• Size: 25 cm
• Classification:
  • LCC : TK7874
  • DC19 : 621.381/7
• Subject Headings:
  • LCSH : Microelectronics -- Materials -- Congresses
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA00020624