The physics and chemistry of SiO[2] and the Si-SiO[2] interface
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The physics and chemistry of SiO[2] and the Si-SiO[2] interface
Plenum Press, c1988
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"Proceedings of the Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface, held May 15-20, 1988, at the 173rd meeting of the Electrochemical Society, in Atlanta, Georgia"--T.p. verso
Includes bibliographies and index