Ion beam assisted film growth

Author(s)

• 伊藤, 糾次 イトウ, タダツグ

Bibliographic Information

Ion beam assisted film growth

edited by Tadatsugu Itoh

（Beam modification of materials, 3）

Elsevier, 1989

Note

Includes index

• NCID: BA06776816
• ISBN:
  • 0444872809
• LCCN: 88038872
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Amsterdam ; Oxford ; Tokyo
• Pages/Volumes: xvii, 439 p
• Size: 25 cm
• Classification:
  • LCC : QC176.9.M84
  • DC19 : 530.4/1
  • NDC8 : 428.4
• Subject Headings:
  • LCSH : Thin films, Multilayered
  • LCSH : Ion bombardment
  • LCSH : Sputtering (Physics)
  • LCSH : Semiconductor films
• Parent Bibliography ID:
  • BA00891345