Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.

著者

• Wong, C. Y. (Catherine Y.)
• Thompson, C. V. (Carl V.)
• Tu, K. N. (King-Ning)
• Symposium on Polysilicon Films and Interfaces

書誌事項

Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.

editors, C.Y. Wong, C.V. Thompson, K.N. Tu

（Materials Research Society symposium proceedings, v. 106）

Materials Research Society, c1988

注記

"This volume represents the Proceedings of the Symposium on Polysilicon Films and Interfaces"--P. xi

Includes bibliographies and indexes

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA0688725X
• ISBN:
  • 093183774X
• LCCN: 88008927
• 出版国コード: us
• タイトル言語コード: eng
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xi, 369 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.15.S55
  • DC19 : 620.1/93
• 件名:
  • LCSH : Silicon -- Electric properties -- Congresses
  • LCSH : Integrated circuits -- Materials -- Congresses
• 親書誌ID:
  • BA00013775