Ion implantation and beam processing

Author(s)

• Williams, J. S. (James Stanislaus)
• Poate, J. M.

Bibliographic Information

Ion implantation and beam processing

edited by J.S. Williams, J.M. Poate

Academic Press, 1984

Note

Includes bibliographical references and index

Details

• NCID: BA06909986
• ISBN:
  • 0127569804
• LCCN: 83071159
• Country Code: at
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Sydney ; New York
• Pages/Volumes: xi, 419 p.
• Size: 24 cm
• Classification:
  • LCC : QC702.7.I55
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : Ion implantation
  • LCSH : Ion bombardment
  • LCSH : Semiconductor doping
  • LCSH : Electron beams